ArticleNanomaterials (Basel, Switzerland)2026
Effect of TiN Interfacial Layer on the Microstructure and Optoelectronic Properties of AZO/Ag/AZO Multilayer Films.
Haijuan Mei, Yi Yu, Libin Gan, Rui Wang, Zhaohui Guo, Qiuguo Li, Hongping Liang, Huojuan Ye, Zhenting Zhao, Weiping Gong
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10 authors.
Haijuan MeiGuangdong Provincial Key Laboratory of Electronic Functional Materials and Devices, Huizhou University, Huizhou 516007, China.ORCID 0000-0003-3324-7870 Yi YuGuangdong Provincial Key Laboratory of Electronic Functional Materials and Devices, Huizhou University, Huizhou 516007, China.
Libin GanGuangdong Provincial Key Laboratory of Electronic Functional Materials and Devices, Huizhou University, Huizhou 516007, China.
Rui WangGuangxi Key Laboratory of Special Engineering Equipment and Control, Guilin University of Aerospace Technology, Guilin 541004, China.
Zhaohui GuoGuangdong Provincial Key Laboratory of Electronic Functional Materials and Devices, Huizhou University, Huizhou 516007, China.
Qiuguo LiGuangdong Provincial Key Laboratory of Electronic Functional Materials and Devices, Huizhou University, Huizhou 516007, China.ORCID 0000-0002-5014-8543 Hongping LiangGuangdong Provincial Key Laboratory of Electronic Functional Materials and Devices, Huizhou University, Huizhou 516007, China.ORCID 0000-0001-6369-7683 Huojuan YeGuangdong Provincial Key Laboratory of Electronic Functional Materials and Devices, Huizhou University, Huizhou 516007, China.
Zhenting ZhaoGuangdong Provincial Key Laboratory of Electronic Functional Materials and Devices, Huizhou University, Huizhou 516007, China.
Weiping GongGuangdong Provincial Key Laboratory of Electronic Functional Materials and Devices, Huizhou University, Huizhou 516007, China.ORCID 0000-0002-3761-2671 Funding
Characteristic Innovation Project of Guangdong Provincial Universities 2024KTSCX087Guangdong Basic and Applied Basic Research Foundation 2025A1515140254Guangdong-Hui Joint Fund Regional Cultivation Project 2023A1515140074Guangxi Natural Science Foundation 2026GXNSFHA00640118Innovative Research Team of Guangdong Province and Huizhou University IRTHZUKey Areas Research Program for Universities of Guangdong Province 2025ZDZX1036National Natural Science Foundation of China 52405189University-Level College Students Innovation Training Program CX2026084
6 · The paper itselfAbstract
To investigate the effect of the TiN interfacial layer on the microstructure and optoelectronic properties of AZO/Ag/AZO multilayer films, four configurations, namely AAA, ATAA, AATA, and ATATA, were deposited on the glass substrates by magnetron sputtering. All the films exhibited a preferential ZnO (002) orientation. When TiN was located above the Ag layer, the ATAA film preserved a pronounced Ag (111) diffraction feature and exhibited the best overall optoelectronic performance, the average transmittance increased from 78.4% for AAA to 85.9%, the resistivity decreased from 7.2 × 10
Indexed as
AZO/Ag/AZOmicrostructureoptoelectronic propertiesTiN
Identifiers
PMID42726579
PMCPMC13567052
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