A chip-level MEMS short-period seismometer for distributed planetary seismic networks.

Xingyu Wei, Chenhao Du, Shaolin Zhang, Qi Wang, Shimin Jiao, Qiu Wang, Hao Ouyang, Huafeng Liu

Abstract read

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Article in Microsystems & nanoengineering, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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5 · Who and what money

Authors and funding

8 authors.

Xingyu WeiNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement, and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, PR China.

Chenhao DuNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement, and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, PR China.

Shaolin ZhangNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement, and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, PR China.

Qi WangNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement, and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, PR China.

Shimin JiaoNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement, and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, PR China.

Qiu WangNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement, and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, PR China.

Hao OuyangNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement, and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, PR China. haoouyang@hust.edu.cn.

Huafeng LiuNational Gravitation Laboratory, MOE Key Laboratory of Fundamental Physical Quantities Measurement, and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, PR China. huafengliu@hust.edu.cn.ORCID http://orcid.org/0000-0003-0757-2362

Funding

National Natural Science Foundation of China (National Science Foundation of China) T2322008

6 · The paper itself

Abstract

Precise measurement of seismic activity is fundamental to planetary seismology. However, existing planetary microelectromechanical system (MEMS) seismometers encounter a critical bottleneck in balancing compact chip footprint, a low noise floor, and a wide measurement range. This paper presents a miniaturized MEMS seismometer, which has a compact chip footprint of only 5.2 mm × 6.5 mm. The device utilizes corrugated-gap capacitive sensing comb fingers, which significantly reduce sensing nonlinearity while maintaining high displacement sensitivity, effectively extending the linear measurement range and elevating the pull-in acceleration threshold. Furthermore, the system's effective resonant frequency is reduced by exploiting the electrostatic negative stiffness mechanism, which aims to suppress the seismometer's noise floor. Experimental results validate the seismometer's comprehensive performance, demonstrating a noise floor of 5.5 ng/Hz

Identifiers

PMID42722641

DOI10.1038/s41378-026-01440-9

PMCPMC13562733

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.