ArticleMicrosystems & nanoengineering2026
A TSV-packaged SP6T RF MEMS switch with ultra-thin profile and suppressed substrate loss for DC to Ku band application.
Yulong Zhang et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
ArticleMicrosystems & nanoengineering2026
Yulong Zhang et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.