Evidence map›Paper›PMID 42631446›Full record

ArticleSmall (Weinheim an der Bergstrasse, Germany)2026

Stoichiometry-Driven Interdependencies in PECVD a-SiN

Munse Kim, Jin Young Lee, Seo Woo Sim, Do Hoe Kim, Yong-Jin Kim, Kyuhyeon Im, Kwan Hong Min, Hee-Eun Song, Yunae Cho, Unsoo Kim and 5 more

Abstract read
In one paragraph

Article in Small (Weinheim an der Bergstrasse, Germany), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

15 authors.

Munse KimPhotovoltaics Research Department, Korea Institute of Energy Research, Daejeon, Republic of Korea.ORCID https://orcid.org/0009-0006-4763-060X
Jin Young LeeDepartment of Physics, Chungbuk National University, Cheongju, Republic of Korea.
Seo Woo SimPhotovoltaics Research Department, Korea Institute of Energy Research, Daejeon, Republic of Korea.
Do Hoe KimPhotovoltaics Research Department, Korea Institute of Energy Research, Daejeon, Republic of Korea.
Yong-Jin KimPhotovoltaics Research Department, Korea Institute of Energy Research, Daejeon, Republic of Korea.
Kyuhyeon ImPhotovoltaics Research Department, Korea Institute of Energy Research, Daejeon, Republic of Korea.
Kwan Hong MinPhotovoltaics Research Department, Korea Institute of Energy Research, Daejeon, Republic of Korea.
Hee-Eun SongPhotovoltaics Research Department, Korea Institute of Energy Research, Daejeon, Republic of Korea.
Yunae ChoPhotovoltaics Research Department, Korea Institute of Energy Research, Daejeon, Republic of Korea.
Unsoo KimPhotovoltaics Research Department, Korea Institute of Energy Research, Daejeon, Republic of Korea.
Hyungwoo KimPhotovoltaics Research Department, Korea Institute of Energy Research, Daejeon, Republic of Korea.
Kyung Taek JeongPhotovoltaics Research Department, Korea Institute of Energy Research, Daejeon, Republic of Korea.
Hae-Seok LeeGraduate School of Energy and Environment (KU-KIST Green School), Korea University, Seoul, Republic of Korea.ORCID https://orcid.org/0000-0001-6860-938X
Sang Hee LeePhotovoltaics Research Department, Korea Institute of Energy Research, Daejeon, Republic of Korea.
Ka-Hyun KimDepartment of Physics, Chungbuk National University, Cheongju, Republic of Korea.ORCID https://orcid.org/0000-0002-4763-2713

Funding

Institute of Information & Communications Technology Planning & Evaluation (IITP)-Information Technology Research Center (ITRC) IITP-RS-2024-00437284Korea Institute of Energy Technology Evaluation and Planning 20214000000680Korea Institute of Energy Technology Evaluation and Planning RS-2025-02483053National Research Foundation of Korea RS-2024-00347775Research and Development Program of the Korea Institute of Energy Research (KIER) C6-2403-14
6 · The paper itself

Abstract

Amorphous hydrogenated silicon nitride (a-SiN

Indexed as

dielectric–semiconductor interfacemultifunctional dielectric layersoptical‐passivation trade‐offPECVD a‐SiNx:H filmsprocess‐driven failurestoichiometry

Identifiers

PMID42631446
PMCPMC13592407

What OpenQuestion holds

Textmetadata
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.