ArticleACS omega2026
In Situ Fluorine Doping of FZO Films by Atomic Layer Deposition.
Article in ACS omega, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Authors and funding
2 authors.
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Abstract
In optoelectronic devices, fluorine-doped semiconductors have been used widely. Atomic layer deposition (ALD) is one of the main processes integrated into semiconductor manufacturing and a perfect candidate to obtain conformally covered films for complex geometries at low temperatures on a budget. Due to the lack of a proper fluorine source, fluorine doping with ALD has been a challenge. In this study, fluorine-doped ZnO (FZO) thin films by ALD were successfully achieved, demonstrating the efficiency and practicality of a new homemade precursor mixture: ammonium fluoride/water (NH
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