ArticleJournal of synchrotron radiation2026
Monolithic integration of SiC diode detectors into scanning X-ray microscopy optical elements for in situ beam diagnostics.
Article in Journal of synchrotron radiation, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
Reliable monitoring of the incident X-ray beam intensity and position is essential in soft X-ray microspectroscopy, where beam instabilities directly affect data normalization and achievable spatial resolution. Conventional beam diagnostics are often implemented using offline detectors located far from the sample or by measuring downstream on empty regions of the sample support membrane, not fully reflecting the experimental conditions experienced during measurements. In this work, the development of functionalized soft X-ray optical elements based on monolithic silicon carbide (SiC) diode detectors, enabling real-time in situ beam diagnostics directly within a scanning transmission X-ray microscopy (STXM) setup, is presented. Two complementary device geometries are investigated: order-sorting aperture (OSA)-based detectors and center-stop-based detectors. The devices are fabricated using plasma-focused-ion-beam milling and substrate thinning, allowing the integration of optical and sensing functionalities with minimal changes to the beamline and endstation setup. The performance of the functionalized optics is experimentally validated at the PolLux STXM beamline of the Swiss Light Source. The devices provide simultaneous access to the transverse beam position and the incident beam intensity I
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