Evidence map›Paper›PMID 42534494›Full record

ArticleJournal of electron spectroscopy and related phenomena2023

Operando photoelectron spectromicroscopy of nanodevices: Correlating the surface chemistry and transport in SnO

Andrei Kolmakov, J Trey Diulus, Kurt D Benkstein, Steve Semancik, Majid Kazemian, Matteo Amati, Maya Kiskinova, Luca Gregoratti

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Journal of electron spectroscopy and related phenomena, 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors.

Andrei KolmakovNational Institute of Standards and Technology (NIST), Gaithersburg, MD, USA.
J Trey DiulusNational Institute of Standards and Technology (NIST), Gaithersburg, MD, USA.
Kurt D BenksteinNational Institute of Standards and Technology (NIST), Gaithersburg, MD, USA.
Steve SemancikNational Institute of Standards and Technology (NIST), Gaithersburg, MD, USA.
Majid KazemianDiamond Light Source Ltd, Didcot Oxfordshire, OX11 0DE, UK.
Matteo AmatiElettra-Sincrotrone Trieste S.C.p.A, 34149 Basovizza, Trieste, Italy.
Maya KiskinovaElettra-Sincrotrone Trieste S.C.p.A, 34149 Basovizza, Trieste, Italy.
Luca GregorattiElettra-Sincrotrone Trieste S.C.p.A, 34149 Basovizza, Trieste, Italy.

Funding

Intramural NIST DOC 9999-NIST
6 · The paper itself

Abstract

With size reduction of active elements in microelectronics to tens of nanometers and below, the effect of surface and interface properties on overall device performance becomes crucial. High resolution spectroscopic and imaging techniques provide a metrological route for characterization of these properties relevant to device diagnostics and failure analysis. With its roughly 100 nm spatial resolution, superior surface sensitivity, and approximately 200 meV spectral resolution, scanning photoelectron microscopy (SPEM) stands out as a comprehensive tool to access the surface/interface composition of nanodevices, as well to provide chemical state designations and materials property evolutions upon treatment by thermal, electrical, chemical, radiative and other stimuli. Here we present a SPEM-on-device setup that combines X-ray spectromicroscopy with advanced NIST microhotplate technology to demonstrate new combined analytical and electrical measurements capabilities of this metrology platform for

Indexed as

Beam induced current microscopyChemical sensorsDevice diagnosticsFailure analysisMicrohotplate platformNanowiresOperando modeSPEMXPS

Identifiers

PMID42534494
PMCPMC13421110

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.