In Situ Cold-Junction Compensation Strategy for Semiconductor Thin-Film Thermocouples Based on a Pt Thin-Film Resistance Temperature Detector.

Yuelong Li, Lantian Tang, Zhixuan Su, Yi Xu, Xianwei Qian, Yifan Wang, Qinnan Chen, Chao Wu

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Article in Sensors (Basel, Switzerland), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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8 authors.

Yuelong LiDepartment of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science & Technology, Xiamen University, Xiamen 361005, China.

Lantian TangDepartment of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science & Technology, Xiamen University, Xiamen 361005, China.

Zhixuan SuDepartment of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science & Technology, Xiamen University, Xiamen 361005, China.

Yi XuResearch Institute Aero-Engine, Beihang University, Beijing 100191, China.

Xianwei QianDepartment of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science & Technology, Xiamen University, Xiamen 361005, China.

Yifan WangDepartment of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science & Technology, Xiamen University, Xiamen 361005, China.

Qinnan ChenDepartment of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science & Technology, Xiamen University, Xiamen 361005, China.

Chao WuDepartment of Mechanical Engineering, University of California at Berkeley, Berkeley, CA 94720, USA.

Funding

National Natural Science Foundation of China No. 62475224the 2024 externally commissioned project of Sichuan Gas Turbine Research Institute of AECC No. GJLZ-0203-2024-0006

6 · The paper itself

Abstract

Semiconductor thin-film thermocouples offer significant advantages for in situ temperature monitoring in advanced engineering equipment. However, the absence of a reliable cold-junction temperature compensation methodology has constrained their practical deployment. This study proposes an in situ cold-junction compensation strategy based on a Pt thin-film resistance temperature detector (RTD), wherein the Pt thin-film RTD is conformally integrated with an ITO-In

Indexed as

cold-junction compensationin situ temperature monitoringITO–In2O3Pt thin-film temperature detectorsemiconductor thin-film thermocouple

Identifiers

PMID42515221

DOI10.3390/s26144337

PMCPMC13418383

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