Evidence map›Paper›PMID 42502206›Full record

ArticleSmall (Weinheim an der Bergstrasse, Germany)2026

Phase Engineering of Plasma-Enhanced Atomic Layer Deposited Molybdenum Disulfide Using High Accuracy Direct Writing With Focused Li

Marvin Krüner, Achim Nadzeyka, Malte Jonas Marius Julian Becher, Zhongquan Liao, Detlef Rogalla, André Clausner, Andreas Ostendorf, Michael Kahl, Claudia Bock

Abstract read
In one paragraph

Article in Small (Weinheim an der Bergstrasse, Germany), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

9 authors.

Marvin KrünerMicrosystems Technology, Ruhr University Bochum, Bochum, Germany.ORCID https://orcid.org/0009-0007-5305-8811
Achim NadzeykaRAITH GmbH, Dortmund, Germany.ORCID https://orcid.org/0009-0003-9078-3466
Malte Jonas Marius Julian BecherApplied Laser Technologies, Ruhr University Bochum, Bochum, Germany.ORCID https://orcid.org/0000-0002-1074-5503
Zhongquan LiaoFraunhofer Institute for Ceramic Technologies and Systems IKTS, Dresden, Germany.ORCID https://orcid.org/0000-0001-7868-4594
Detlef RogallaRUBION, Ruhr University Bochum, Bochum, Germany.ORCID https://orcid.org/0000-0002-5404-2498
André ClausnerFraunhofer Institute for Ceramic Technologies and Systems IKTS, Dresden, Germany.ORCID https://orcid.org/0000-0002-6384-5970
Andreas OstendorfApplied Laser Technologies, Ruhr University Bochum, Bochum, Germany.ORCID https://orcid.org/0000-0002-3601-6392
Michael KahlRAITH GmbH, Dortmund, Germany.ORCID https://orcid.org/0009-0006-8396-2441
Claudia BockMicrosystems Technology, Ruhr University Bochum, Bochum, Germany.ORCID https://orcid.org/0000-0003-0933-9556

Funding

Bundesministerium für Bildung und Forschung 16ES0941Bundesministerium für Bildung und Forschung 16ES1096KMicrosystems Technology
6 · The paper itself

Abstract

Two-dimensional (2D) transition metal dichalcogenides (TMDCs), such as molybdenum disulfide (

Indexed as

atomic layer depositionfocused ion beamintercalationphase engineeringultrashort pulse laser

Identifiers

PMID42502206
PMCPMC13592421

What OpenQuestion holds

Textmetadata
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.