Evidence map›Paper›PMID 42425980›Full record

ArticleNature communications2026

Reversibly Stacked Monolithic 3D Integrated Circuits.

Tzu-Ting Weng, Sung-Tsun Wang, Yu-Cheng Chang, Kai-Wei Li, Chia-Chen Chung, Chia-Hung Lo, Robert Tseng, Shih-Chieh Chen, Tsung-Te Chou, Terry Y T Hung and 4 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Nature communications, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

14 authors.

Tzu-Ting Weng *Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan.
Sung-Tsun Wang *Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan.
Yu-Cheng ChangInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan.
Kai-Wei LiInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan.
Chia-Chen ChungDepartment of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan.ORCID http://orcid.org/0009-0003-2826-784X
Chia-Hung LoDepartment of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan.
Robert TsengInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan.
Shih-Chieh ChenInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan.
Tsung-Te ChouNational Center for Instrumentation Research, National Institutes of Applied Research, Hsinchu, Taiwan.
Terry Y T HungTaiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan.
Chao-Ching ChengTaiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan.
Iuliana P RaduTaiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan.
Yu-Lun ChuehDepartment of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan. ylchueh@mx.nthu.edu.tw.ORCID http://orcid.org/0000-0002-0155-9987
Der-Hsien LienInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, Taiwan. dhlien@nycu.edu.tw.ORCID http://orcid.org/0000-0001-6774-2074

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Monolithic three-dimensional integration enables dense vertical stacking of devices with fine-pitch interconnects, offering a promising route toward high-density, energy-efficient logic and memory systems. However, its implementation is constrained by the thermal budget of back-end-of-line processes, which must remain below 400 °C to avoid degrading underlying circuitry. While various low-temperature semiconductors have been explored, current demonstrations remain confined to fixed stacking sequences due to high-temperature growth or transfer requirements. Here, we demonstrate a M3D complementary field-effect transistor architecture using low-temperature-deposited n-type In

Identifiers

PMID42425980
PMCPMC13478366

What OpenQuestion holds

Textmetadata
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.