ArticleMicromachines2026
Nonlinear Modeling and Differential-Voltage Control of an Electrostatic MEMS Micromirror for Miniaturized Laser Communication Terminals.
Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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1 citing paper in PubMed.
- Lie Classification and Symmetry-Preserving Reduced-Order Modeling of Nonlinear Electrostatic MEMS.Micromachines · 2026Article
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5 authors.
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Abstract
Electrostatic MEMS micromirrors provide a compact and low-power beam-steering solution for miniaturized laser communication terminals. However, when they are used for quasi-static beam pointing rather than resonant scanning, the nonlinear voltage-angle relationship, bidirectional actuation asymmetry, and terminal-level installation errors can significantly degrade pointing accuracy. In this paper, a nonlinear modeling and differential-voltage control method is investigated for a two-axis electrostatic MEMS micromirror used in a miniaturized laser communication terminal. The device under test is a bonded aluminum MEMS micromirror with a 5.0 mm aperture. Static and dynamic characterization results show that the micromirror achieves maximum mechanical deflection angles of 5.215° and 5.161° along the X and Y axes, respectively, with resonant frequencies of 317 Hz and 319 Hz. To improve the accuracy of quasi-static pointing, the differential-voltage actuation principle is analyzed, and a nonlinear voltage-angle model is established based on measured deflection data. Compared with a first-order linear model, the cubic nonlinear model reduces the root-mean-square fitting error from 0.142° to 0.0127° for the X axis and from 0.132° to 0.0109° for the Y axis. Furthermore, a terminal-level calibration architecture based on a quadrant detector is introduced to map the MEMS angular deflection to the received spot position. The proposed modeling and calibration approach provides an actuator-level basis for accurate beam pointing and closed-loop acquisition in miniaturized laser communication terminals.
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