ArticleMicromachines2026
Multi-Damping Mechanism Analysis and Quality Factor Optimization of Micromachined Disk Resonator Gyroscopes.
Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
A high quality factor, denoted as the Q-factor, is crucial for micromachined disk resonator gyroscopes, commonly referred to as DRGs, to suppress thermomechanical noise and improve bias stability. However, the coupled energy dissipation mechanisms under low-pressure conditions impose significant limitations on further Q-factor enhancement. This paper establishes a rigorous multiphysics damping analysis framework for DRGs and quantitatively investigates the contributions of air damping, thermoelastic damping, and anchor loss. A free-molecular squeeze-film damping model is derived based on kinetic gas theory and molecular energy transfer mechanisms, avoiding the continuous fluid assumption of the classical Reynolds equation, which fails in low-pressure regimes. Due to the highly symmetric ring structure and central anchor design, finite element method simulations reveal an extremely high anchor-loss-limited quality factor, Q_anchor, of approximately 1.85 × 10
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