A high-resolution electrostatically actuated MEMS Fabry-Pérot tunable filter for LWIR imaging and sensing applications.

Tengfei Xu, Huipeng Yang, Haiyang Hou, Siyao Xu, Zhipeng Yao, Peng Wang, Longfei Li, Kun Zhang, Jicong Zhao

Abstract read

In one paragraph

Article in Microsystems & nanoengineering, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

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0cells of the map it votes in

1citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

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3 · Its place in the literature

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1 citing paper in PubMed.

Lie Classification and Symmetry-Preserving Reduced-Order Modeling of Nonlinear Electrostatic MEMS.Micromachines · 2026
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5 · Who and what money

Authors and funding

9 authors.

Tengfei XuSchool of Microelectronics and School of Integrated Circuits (Jiangsu Key Laboratory of Semi. Dev. & IC Design, Package and Test), Nantong University, Nantong, Jiangsu, China.

Huipeng YangSchool of Microelectronics and School of Integrated Circuits (Jiangsu Key Laboratory of Semi. Dev. & IC Design, Package and Test), Nantong University, Nantong, Jiangsu, China.

Haiyang HouSchool of Microelectronics and School of Integrated Circuits (Jiangsu Key Laboratory of Semi. Dev. & IC Design, Package and Test), Nantong University, Nantong, Jiangsu, China.

Siyao XuSchool of Microelectronics and School of Integrated Circuits (Jiangsu Key Laboratory of Semi. Dev. & IC Design, Package and Test), Nantong University, Nantong, Jiangsu, China.

Zhipeng YaoSchool of Microelectronics and School of Integrated Circuits (Jiangsu Key Laboratory of Semi. Dev. & IC Design, Package and Test), Nantong University, Nantong, Jiangsu, China.

Peng WangState Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai, China.

Longfei LiSchool of Microelectronics and School of Integrated Circuits (Jiangsu Key Laboratory of Semi. Dev. & IC Design, Package and Test), Nantong University, Nantong, Jiangsu, China. Longfei_Li@ntu.edu.cn.

Kun ZhangState Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai, China. zhangkun@mail.sitp.ac.cn.

Jicong ZhaoSchool of Microelectronics and School of Integrated Circuits (Jiangsu Key Laboratory of Semi. Dev. & IC Design, Package and Test), Nantong University, Nantong, Jiangsu, China. jczhao@ntu.edu.cn.

Funding

Basic Research Program of Jiangsu Province No. BK20250155National Natural Science Foundation of China (National Science Foundation of China) No. 62505146Natural Science Foundation of Jiangsu Province (Jiangsu Provincial Natural Science Foundation) No. 25KJB510026

6 · The paper itself

Abstract

The long-wave infrared (LWIR) band lies near the peak of natural thermal emission, enabling stable passive imaging without active illumination, and it also covers characteristic spectral features of many important materials, making it a key spectral region for sensing and identification. However, the development of micro-electromechanical systems Fabry-Pérot tunable filters (MEMS-FPTFs) in this band is limited by strong material absorption, scarce low-loss thin-film options, and the difficulty of fabricating thick, low-stress, high-reflectivity distributed Bragg reflectors (DBRs). This work presents an electrostatically actuated MEMS-FPTF tailored for LWIR operation through an optical-mechanical co-design strategy. A low-loss Ge/ZnS DBR with > 92% reflectivity, combined with a C

Identifiers

PMID42324247

DOI10.1038/s41378-026-01360-8

PMCPMC13284181

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.