ArticleMicrosystems & nanoengineering2026
Batch-fabrication of all-dielectric vapor cells enabling optically addressed Rydberg atom electrometry.
Article in Microsystems & nanoengineering, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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1 citing paper in PubMed.
- MEMS vapor cells-based Rydberg-atom electrometry toward miniaturization and high sensitivity.Microsystems & nanoengineering · 2026Article
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12 authors.
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Abstract
Millimeter-scale atomic vapor cells can be accurately and economically batch-fabricated by anodically bonding silicon and glass wafers, enabling the manufacturing of miniature atomic clocks and quantum sensors. However, silicon's high dielectric constant and conductive losses at millimeter wave frequencies limit its suitability for Rydberg-atom electrometry, which enables highly sensitive electric-field measurements by exploiting the extreme polarizability of Rydberg states in alkali atoms. To address this, we present an all-glass wafer-level microfabrication process that eliminates silicon, creating hermetically sealed vapor cells that are stable over long timelines with embedded cesium dispensers. Femtosecond laser machining precisely defines the cell geometry, and laser-activated alkali loading ensures reliable filling. We demonstrate long-term vacuum stability and robust Rydberg excitation through electromagnetically induced transparency measurements. We then use these cells to measure a 34 GHz millimeter wave field resonant with the
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