Evidence map›Paper›PMID 42294529›Full record

ArticleAngewandte Chemie (International ed. in English)2026

Electron-Induced C─F Bond Activation in Sn

Wenzheng Li, Min Zhang, Yingdong Zhao, Riyao Cong, Runfeng Xu, Saihe Yang, Xiaofeng Gong, Daohan Wang, Jiangli Fan, Jun Zhao and 2 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Angewandte Chemie (International ed. in English), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

12 authors.

Wenzheng LiState Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian, China.
Min ZhangState Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian, China.
Yingdong ZhaoState Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian, China.
Riyao CongState Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian, China.
Runfeng XuState Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian, China.
Saihe YangState Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian, China.
Xiaofeng GongState Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian, China.
Daohan WangState Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian, China.
Jiangli FanState Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian, China.ORCID https://orcid.org/0000-0003-4962-5186
Jun ZhaoShanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai, China.
Pengzhong ChenState Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian, China.ORCID https://orcid.org/0000-0002-6935-1146
Xiaojun PengState Key Laboratory of Fine Chemicals, Frontiers Science Center for Smart Materials, School of Chemical Engineering, Dalian University of Technology, Dalian, China.ORCID https://orcid.org/0000-0002-8806-322X

Funding

Fundamental Research Funds for the Central Universities DUT22LAB608Liaoning Binhai Laboratory LBLB604 2023-03National Natural Science Foundation of China 22090010National Natural Science Foundation of China 22090011National Natural Science Foundation of China 22378052Science and Technology Project of Liaoning Province 2022JH25/10100007
6 · The paper itself

Abstract

Metal-oxo cluster (MOC) resists are promising candidates for extreme ultraviolet lithography (EUVL), but optimizing the resolution, line-edge roughness (LER), and sensitivity (RLS) trade-off remains challenging. Leveraging dissociative electron attachment (DEA) to activate C─F bonds provides a controllable handle to improve this RLS trade-off, yet remains underexplored. Here, we report a room-temperature, scalable synthesis of a tunable series of Sn-oxo clusters and demonstrate hundred-gram-scale, single-batch production. The fluorinated FPAA demonstrates enhanced sensitivity without compromising resolution or LER. Under electron beam lithography (EBL), FPAA achieves a critical dimension (CD) of 9.1 nm and an LER of 2.2 nm, and enables high-fidelity complex patterning. Additionally, FPAA exhibits robust performance under deep ultraviolet (DUV) lithography and EUVL, achieving a CD of 20.9 nm under EUVL. FPAA also shows exceptional plasma resistance, achieving a high estimated Si:resist etch selectivity of >50:1. Mechanistic analyses indicate that irradiation-generated low-energy secondary electrons (LESEs) promote electron-induced C─F activation, consistent with a DEA-mediated pathway. Concurrently, organic ligand bridging and Sn─O─Sn network densification occur, forming a crosslinked network that drives the solubility switch. This work elucidates the lithographic mechanisms of Sn-oxo clusters and provides design principles for MOC resists, supporting progress toward sub-10-nm lithographic resolution.

Indexed as

dissociative electron attachmentelectron beam lithographyetch resistanceextreme ultraviolet lithographymetal‐oxo cluster photoresists

Identifiers

PMID42294529
PMCPMC13480786

What OpenQuestion holds

Textmetadata
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.