ArticleMaterials (Basel, Switzerland)2026
Design of MEMS Gas Sensors and Integration for Multiple Gas Classification for Lithium-Ion Battery Thermal Runaway Warning.
Article in Materials (Basel, Switzerland), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
Characteristic gas-based detection technology can facilitate the warning of lithium-ion battery thermal runaway with a high accuracy at an early stage. Microelectromechanical system (MEMS) metal-oxide-semiconductor (MOS) gas sensors have advantages of a low cost, a high accuracy, and low power consumption; therefore, they are ideal candidates for the lithium-ion battery thermal-runaway warning. MEMS MOS gas sensors are composed of a micro-hotplate and gas-sensitive materials. The micro-hotplate component strongly influences the device's mechanical and thermal properties. Initially, we used COMSOL to optimize the micro-hotplate component. Then, we fabricated the device based on the optimal micro-hotplate. Next, gas-sensitive materials made of ZnO and ZnO-Au were deposited on the micro-hotplate by radio-frequency magnetic sputtering. The self-made and commercial MEMS MOS sensors were integrated to form an electronic nose. The as-made electronic nose can classify hydrogen, ethylene, acetylene, methane, carbon monoxide, and ethanol with a maximum accuracy of 99.4% using gas response data acquired over only 20 s. The reported work can provide a solution for an early and accurate lithium-ion battery thermal runaway warning.
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