Porous Au/Ti Bilayer Thin-Film Getters Based on Black Silicon for MEMS Vacuum Packaging.

Kunwei Zhao, Tianyou Chen, Yuelong Liu, Ji Fan

Abstract read

In one paragraph

Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

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Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

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0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

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PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

4 authors.

Kunwei ZhaoNational Gravimetry Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China.

Tianyou ChenNational Gravimetry Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China.

Yuelong LiuNational Gravimetry Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China.

Ji FanNational Gravimetry Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China.ORCID 0000-0001-5774-0059

Funding

National Key Research and Development Program of China 2023YFC2205701

6 · The paper itself

Abstract

Porous thin-film getters are extensively utilized in the field of MEMS vacuum packaging. Nevertheless, their effectiveness is frequently constrained by the comparatively modest effective surface area of conventional planar structures. In this work, a porous Au/Ti thin-film getter based on a three-dimensional black silicon scaffold is developed to enhance the effective surface area and improve gettering performance. The fabrication of black silicon nanostructures is achieved through an SF

Indexed as

black siliconMEMS vacuum packagingporous structurethin-film getter

Identifiers

PMID42195437

DOI10.3390/mi17050520

PMCPMC13208573

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.