ArticleMicromachines2026
BO-LSTM-Based TDE Precise Estimation Model of Capacitive MEMS-Gyros Using Thermal-Induced Physical Characteristics Variation Analysis.
Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
Owing to the fact that the conventional Temperature Drift Errors (TDEs) precise estimation model of Capacitive MEMS-Gyros (CMG) has incomplete Temperature Correlated Quantities (TCQ) and an imperfect parameter identification method to reduce bias stability, a BO-LSTM-based TDE precise estimation model using thermal-induced physical characteristics variation analysis is proposed. By analyzing microstructural deformation in CMG- and Si-based materials' stiffness deterioration caused by thermal-induced physical characteristics variation, complete TCQ are traced, including ambient temperature variation ∆
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