Evidence map›Paper›PMID 42168147›Full record

ArticleMicrosystems & nanoengineering2026

A curved-beam piezoelectric MEMS resonator featuring multiple temperature plateaus with enhanced stability.

Yancheng Lian, Yueyang Li, Fangzhou Chen, Zhuoyue Zheng, Jinuo Zhou, Junchen Liu, Fengzhe Xu, Jinbo Yang, Jianlin Chen, Chen Wang and 5 more

Abstract read
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In one paragraph

Article in Microsystems & nanoengineering, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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1 · What the graph read from it

What it found

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2 · The registry

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3 · Its place in the literature

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0 citing papers in PubMed.

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4 · The record

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5 · Who and what money

Authors and funding

15 authors.

Yancheng LianInstitute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.ORCID http://orcid.org/0009-0005-7765-4867
Yueyang LiInstitute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.
Fangzhou ChenInstitute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.
Zhuoyue ZhengInstitute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.
Jinuo ZhouInstitute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.
Junchen LiuInstitute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.
Fengzhe XuInstitute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.
Jinbo YangInstitute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.
Jianlin ChenSchool of Microelectronics, Shanghai University, Shanghai, China.ORCID http://orcid.org/0000-0002-4459-9954
Chen WangMicro and Nano Systems (MNS) group, Department of Electrical Engineering, University of Leuven, Leuven, Belgium.ORCID http://orcid.org/0000-0003-3476-3658
Michael KraftMicro and Nano Systems (MNS) group, Department of Electrical Engineering, University of Leuven, Leuven, Belgium.
Ka-Meng LeiInstitute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.
R P MartinsInstitute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.
Pui-In MakInstitute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China.
Yuan WangInstitute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China. yuanwang@um.edu.mo.ORCID http://orcid.org/0000-0003-3814-4520

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Silicon-based Micro-electromechanical Systems (MEMS) resonators face stability challenges due to their temperature susceptibility, which impedes the advancement towards high-precision applications. This work reports a multi-modal curved-beam piezoelectric resonator that enhances frequency stability through engineered irregular geometry and mechanical nonlinearity. Utilizing a standard Silicon-On-Insulator (SOI) - Aluminum Nitride (AlN) process, the proposed device engenders 17 vibration modes within 5 MHz, addressing the detection constraints and information extraction of non-inplane modes for capacitive counterparts and circumventing the needs of vacuum encapsulation. In addition, owing to the inimitable temperature coefficient of frequency (TCf) insensitive plateaus discovered in high-frequency modes (Mode 16 and Mode 18), a novel stability enhancement strategy has emerged. Through open-loop sweeps and phase-locked loop (PLL) tracking, it is suggested that these plateaus likely stem from modal coupling triggered by mechanical nonlinearities. This behavior, reminiscent of frequency veering, potentially enables energy redistribution between modes, leading to the resonance frequency deviating from the intrinsic thermal drift trajectory of silicon. Experimental results show that Mode 16 achieves a stability of 17.4 ppb at 46.390 s at a 62 °C plateau under ±1 °C fluctuations and reaches 2.0 ppb under stringent temperature regulation. Mode 18 reaches a peak stability of 37.9 ppb at 43 °C. This innovative approach presents a promising avenue for developing high-precision frequency references without the need for intricate TCf compensation, providing considerable potential for the evolution of next-generation silicon micro-resonators and enhancing their capabilities as stable timing sources in various applications.

Identifiers

PMID42168147
PMCPMC13195157

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.