Two-photon states meet polarization-gradient metasurfaces for nanometric, low-dose lateral-displacement metrology.

Qian-Mei Deng, Jun-Hao Zeng, Feng-Jun Li, Zi-Lan Deng

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Article in Light, science & applications, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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5 · Who and what money

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4 authors.

Qian-Mei DengGuangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, College of Physics & Optoelectronic Engineering, Jinan University, Guangzhou, 510632, China.

Jun-Hao ZengGuangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, College of Physics & Optoelectronic Engineering, Jinan University, Guangzhou, 510632, China.

Feng-Jun LiGuangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, College of Physics & Optoelectronic Engineering, Jinan University, Guangzhou, 510632, China.

Zi-Lan DengGuangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, College of Physics & Optoelectronic Engineering, Jinan University, Guangzhou, 510632, China. zilandeng@jnu.edn.cn.ORCID http://orcid.org/0000-0003-3861-6014

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Accurate displacement sensing is indispensable in advanced semiconductor lithography. Conventional coherent-light-based approaches are hindered by photon budget limitations, slowing down in-situ measurements. In a recent study, Chen et al. introduced a polarization-gradient metasurface integrated with two-photon quantum interference to achieve equivalent precision with only ~3% of the photons required by classical methods. This work represents a decisive step in merging metasurfaces with quantum resources, paving the way for high-speed, low-noise, and integration-ready displacement metrology.

Identifiers

PMID42168144

DOI10.1038/s41377-026-02223-7

PMCPMC13195080

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.