ArticleNature communications2026
Broadband extreme ultraviolet zeroth order scatterometry for nanostructure metrology.
Article in Nature communications, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Authors and funding
8 authors.
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Abstract
The continuous shrinkage of critical dimensions in nanofabrication demands nanometrology at the relevant resolution, which can be achieved using short-wavelength light sources. Most industrial metrology uses periodic structures for process control, exploiting diffraction to probe the fabrication quality of actual device structures. Here, we introduce a table-top high-harmonic generation extreme-ultraviolet scatterometry with broadband illumination. Our method exploits the spectrally resolved 0
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