Evidence map›Paper›PMID 42138806›Full record

ArticleAdvanced science (Weinheim, Baden-Wurttemberg, Germany)2026

Backbone-Length-Optimized Inhibitors Deliver Long-Retention Selectivity in Area-Selective ALD of VO

Hae Lin Yang, Eun Chong Cho, Minchan Kim, Hye In Park, Ga-Young Lee, Seunghwan Lee, Beomseok Kim, Changhwa Jung, Youngkwon Kim, Jin-Seong Park

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Advanced science (Weinheim, Baden-Wurttemberg, Germany), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

10 authors.

Hae Lin YangDivision of Materials Science and Engineering, Hanyang University, Seoul, Republic of Korea.
Eun Chong ChoThin Film Materials Research Center, Research Institute of Chemical Technology (KRICT), Daejeon, Republic of Korea.
Minchan KimDivision of Materials Science and Engineering, Hanyang University, Seoul, Republic of Korea.
Hye In ParkDepartment of Semiconductor Engineering, Hanyang University, Seoul, Republic of Korea.
Ga-Young LeeDivision of Materials Science and Engineering, Hanyang University, Seoul, Republic of Korea.
Seunghwan LeeSemiconductor Research and Development Center, Samsung Electronics Company, Hwaseong-si, Gyeonggi-do, Republic of Korea.
Beomseok KimSemiconductor Research and Development Center, Samsung Electronics Company, Hwaseong-si, Gyeonggi-do, Republic of Korea.
Changhwa JungSemiconductor Research and Development Center, Samsung Electronics Company, Hwaseong-si, Gyeonggi-do, Republic of Korea.
Youngkwon KimThin Film Materials Research Center, Research Institute of Chemical Technology (KRICT), Daejeon, Republic of Korea.
Jin-Seong ParkDivision of Materials Science and Engineering, Hanyang University, Seoul, Republic of Korea.ORCID https://orcid.org/0000-0002-9070-5666

Funding

Korean Government (MSIT) RS-2023-00260527Samsung Electronics IO251211-14296-01
6 · The paper itself

Abstract

Area-selective atomic-layer deposition (AS-ALD) relies on surface inhibitors; however, their molecular design remains empirical owing to the lack of a unified framework linking the molecular structure to inhibition performance. In this study, we systematically investigate the influence of the carbon-backbone length of trimethoxyphenyl(alkyl)silane small-molecule inhibitors (SMIs) on adsorption behavior and selectivity in the AS-ALD of VO

Indexed as

adsorption behaviorarea‐selective atomic‐layer depositionsmall‐molecule inhibitorsteric hindrancevanadium oxide

Identifiers

PMID42138806
PMCPMC13335821

What OpenQuestion holds

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LicenceCC BY
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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.