ArticleMaterials (Basel, Switzerland)2026
Effect of Heating/Cooling Rate and Temperature on Microstructure and Electrical Properties of Sputter-Deposited PZT Thin Films Crystallized by Conventional Furnace Annealing.
Article in Materials (Basel, Switzerland), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
Lead zirconate titanate (PZT) is a widely used material for applications in microsensors, actuators, and transducers. Due to its high piezoelectric coefficient, large dielectric constant, and strong polarization capability near the morphotropic phase boundary (Zr/Ti ≈ 52/48), it is considered one of the most attractive materials for micro-electromechanical systems (MEMS). These advantageous material properties strongly depend on the PZT layer's microstructure and crystallinity, which are primarily determined by the choice of seed layer, deposition conditions, and the post-deposition annealing treatment that promotes the formation of the PZT's perovskite phase. In this contribution, sputter-deposited PZT thin films were crystallized by conventional furnace annealing (CFA) to evaluate the effect of heating/cooling rates (1 °C·min
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