The Mechanism of Ruthenium Oxide Catalyzed Electroless Etching of Silicon in Oxidizing HF Solution.

Bing Bai, Yingqi Li, Wei Xu, Peiao Lu, Jiakun Luo, Jinyu Wu, Kui-Qing Peng

Abstract read

In one paragraph

Article in Materials (Basel, Switzerland), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

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3 · Its place in the literature

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0 citing papers in PubMed.

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4 · The record

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5 · Who and what money

Authors and funding

7 authors.

Bing BaiKey Laboratory of Multiscale Spin Physics, Ministry of Education, Beijing Key Laboratory of Energy Conversion and Storage Materials, School of Physics and Astronomy, Beijing Normal University, Beijing 100875, China.

Yingqi LiKey Laboratory of Multiscale Spin Physics, Ministry of Education, Beijing Key Laboratory of Energy Conversion and Storage Materials, School of Physics and Astronomy, Beijing Normal University, Beijing 100875, China.

Wei XuKey Laboratory of Multiscale Spin Physics, Ministry of Education, Beijing Key Laboratory of Energy Conversion and Storage Materials, School of Physics and Astronomy, Beijing Normal University, Beijing 100875, China.

Peiao LuKey Laboratory of Multiscale Spin Physics, Ministry of Education, Beijing Key Laboratory of Energy Conversion and Storage Materials, School of Physics and Astronomy, Beijing Normal University, Beijing 100875, China.

Jiakun LuoKey Laboratory of Multiscale Spin Physics, Ministry of Education, Beijing Key Laboratory of Energy Conversion and Storage Materials, School of Physics and Astronomy, Beijing Normal University, Beijing 100875, China.

Jinyu WuKey Laboratory of Multiscale Spin Physics, Ministry of Education, Beijing Key Laboratory of Energy Conversion and Storage Materials, School of Physics and Astronomy, Beijing Normal University, Beijing 100875, China.

Kui-Qing PengKey Laboratory of Multiscale Spin Physics, Ministry of Education, Beijing Key Laboratory of Energy Conversion and Storage Materials, School of Physics and Astronomy, Beijing Normal University, Beijing 100875, China.ORCID 0000-0003-0442-8103

Funding

Guangzhou National Laboratory No. GZNL2024A01028National Natural Science Foundation of China 52371210State Key Laboratory of Catalysis E404082900

6 · The paper itself

Abstract

While metal-assisted chemical etching (MACE) or metal-catalyzed electroless etching of silicon in oxidizing HF solutions typically employs noble metals as catalysts, this work investigates oxide-catalyzed chemical etching (OACE) using RuO

Indexed as

catalysisetchingruthenium oxidesilicon

Identifiers

PMID42124142

DOI10.3390/ma19091734

PMCPMC13164636

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LicenceCC BY

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.