Evidence map›Paper›PMID 42115159›Full record

ArticleMicrosystems & nanoengineering2026

Development of a novel radially-distributed spiral bilayer thermopile infrared sensor with enhanced responsivity.

Yong Xia, Xinyao Meng, Yang Lv, Xiangguang Han, Yiwei Tang, Wanli Jiang, Dehui Xu, Dejiang Lu, Weixuan Jing, Ping Yang and 1 more

Abstract read
In one paragraph

Article in Microsystems & nanoengineering, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

11 authors.

Yong XiaState Key Laboratory for Manufacturing Systems Engineering, State Industry-Education Integration Center for Medical Innovations, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments, Shaanxi Provincial University Engineering Research Center for Micro/Nano Acoustic Devices and Intelligent Systems, Xi'an Jiaotong University, Xi'an, 710049, China.ORCID http://orcid.org/0009-0000-4386-3357
Xinyao MengState Key Laboratory for Manufacturing Systems Engineering, State Industry-Education Integration Center for Medical Innovations, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments, Shaanxi Provincial University Engineering Research Center for Micro/Nano Acoustic Devices and Intelligent Systems, Xi'an Jiaotong University, Xi'an, 710049, China.
Yang LvZhuzhou CRRC Times Electric Co. LTD, Zhuzhou, 412001, China.
Xiangguang HanState Key Laboratory for Manufacturing Systems Engineering, State Industry-Education Integration Center for Medical Innovations, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments, Shaanxi Provincial University Engineering Research Center for Micro/Nano Acoustic Devices and Intelligent Systems, Xi'an Jiaotong University, Xi'an, 710049, China. xiangguang@xjtu.edu.cn.
Yiwei TangState Key Laboratory for Manufacturing Systems Engineering, State Industry-Education Integration Center for Medical Innovations, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments, Shaanxi Provincial University Engineering Research Center for Micro/Nano Acoustic Devices and Intelligent Systems, Xi'an Jiaotong University, Xi'an, 710049, China.
Wanli JiangShanghai Sunshine Technologies Co. Ltd, Shanghai, 200233, China.
Dehui XuShanghai Sunshine Technologies Co. Ltd, Shanghai, 200233, China.
Dejiang LuState Key Laboratory for Manufacturing Systems Engineering, State Industry-Education Integration Center for Medical Innovations, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments, Shaanxi Provincial University Engineering Research Center for Micro/Nano Acoustic Devices and Intelligent Systems, Xi'an Jiaotong University, Xi'an, 710049, China. djlu@mail.xjtu.edu.cn.
Weixuan JingState Key Laboratory for Manufacturing Systems Engineering, State Industry-Education Integration Center for Medical Innovations, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments, Shaanxi Provincial University Engineering Research Center for Micro/Nano Acoustic Devices and Intelligent Systems, Xi'an Jiaotong University, Xi'an, 710049, China. wxjing@mail.xjtu.edu.cn.
Ping YangState Key Laboratory for Manufacturing Systems Engineering, State Industry-Education Integration Center for Medical Innovations, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments, Shaanxi Provincial University Engineering Research Center for Micro/Nano Acoustic Devices and Intelligent Systems, Xi'an Jiaotong University, Xi'an, 710049, China.
Libo ZhaoState Key Laboratory for Manufacturing Systems Engineering, State Industry-Education Integration Center for Medical Innovations, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Shaanxi Innovation Center for Special Sensing and Testing Technology in Extreme Environments, Shaanxi Provincial University Engineering Research Center for Micro/Nano Acoustic Devices and Intelligent Systems, Xi'an Jiaotong University, Xi'an, 710049, China.ORCID http://orcid.org/0000-0001-6101-8173

Funding

National Natural Science Foundation of China (National Science Foundation of China) 52305615
6 · The paper itself

Abstract

Current trend of pursuing higher resolution in uncooled cost-effective infrared imagers demands thermopile sensing units with higher responsivity. Conventional designs often have limitations such as non-uniform temperature distribution among individual thermocouple legs or complex fabrication process, which limit further responsivity improvement. Here, a novel thermopile featuring a radially-distributed spiral structure with bilayer P-poly/Al thermocouples is proposed. The radially distributed legs along with the circular membrane effectively improve the temperature uniformity among individual thermocouples. Meanwhile, the spiral bilayer configuration decreases thermal conductance and increases the thermocouple number simultaneously, resulting in a significant enhancement of the responsivity. The spiral parameter was designed and optimized, and the fabricated sensors were characterized and compared with conventional non-spiral thermopiles. Experimental results demonstrate a responsivity of 52.53 V/W and a specific detectivity of 9.76 × 10

Identifiers

PMID42115159
PMCPMC13161401

What OpenQuestion holds

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LicenceCC BY-NC-ND
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.