ArticleMicromachines2026
Design and Implementation of Miniaturized Low-Frequency Flexibility-Enhanced Rotating Cantilever Beam Piezoelectric MEMS Microphone.
Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
1 citing paper in PubMed.
- A Study on a Sector-Shaped Cantilever Diaphragm for Frequency-Response Improvement of an Acoustic Sensor Based on Piezoresistive Effect in MOSFET.Sensors (Basel, Switzerland) · 2026Article
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Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
In response to the pressing need for miniaturized MEMS microphones in wearable technology and mobile devices, and to surmount the technical limitations inherent in conventional piezoelectric microphones, which typically depend on enlarging chip dimensions or decreasing stiffness to attain low resonance frequencies, this study introduces a novel piezoelectric MEMS microphone (PMM) design predicated on a flexibility-enhanced rotating structure. The proposed design utilizes an aluminum scandium nitride (Al
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Registered trials
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