Silicon Dioxide Multi-Mode Interference Spectrometers.

James G Harkness, Denghui Pan, Helio Ramollari, Thomas D Yuzvinsky, Holger Schmidt, Aaron R Hawkins

Abstract read

In one paragraph

Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it

0cells of the map it votes in

0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

James G HarknessDepartment of Electrical and Computer Engineering, Brigham Young University, Provo, UT 84602, USA.

Denghui PanDepartment of Electrical and Computer Engineering, University of California Santa Cruz, Santa Cruz, CA 95064, USA.ORCID 0009-0002-8369-7861

Helio RamollariDepartment of Electrical and Computer Engineering, University of California Santa Cruz, Santa Cruz, CA 95064, USA.ORCID 0009-0008-9715-0166

Thomas D YuzvinskyDepartment of Electrical and Computer Engineering, University of California Santa Cruz, Santa Cruz, CA 95064, USA.ORCID 0000-0001-5708-2877

Holger SchmidtDepartment of Electrical and Computer Engineering, University of California Santa Cruz, Santa Cruz, CA 95064, USA.

Aaron R HawkinsDepartment of Electrical and Computer Engineering, Brigham Young University, Provo, UT 84602, USA.ORCID 0000-0002-3882-0771

Funding

National Science Foundation 2206259National Science Foundation 2206564

6 · The paper itself

Abstract

A multi-mode interferometer (MMI) spectrometer is a type of reconstructive micro-spectrometer based on imaging light propagation patterns in MMI waveguides. A waveguide scattering surface accentuates imaging light patterns in the multi-mode interferometer. This technology has been proven with an SU-8 core waveguide with an etched SU-8 nanograss scattering surface. This paper describes our creation of a fully silicon-based spectrometer using a silica core MMI waveguide. Scattering features were created in silica using SU-8 nanograss as an etch mask in a reactive ion etch (RIE). With optimized etch parameters, the silica core MMI spectrometer achieved an SNR of three with an incident light power of -68 dBm, which was almost 6 dB lower than designs with an SU-8 core.

Indexed as

micro-spectrometermulti-mode interferometerPECVD silicon dioxidereconstructive spectrometerSU-8surface roughening

Identifiers

PMID42076229

DOI10.3390/mi17040453

PMCPMC13118270

What OpenQuestion holds

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.