ArticleMicromachines2026
High-Precision Salt Concentration Detection Using a CMUT Array with Temperature Compensation.
Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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10 authors.
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Abstract
This paper presents a miniaturized and highly accurate saltwater concentration monitoring system based on Capacitive Micromachined Ultrasonic Transducer (CMUT) array technology. The system incorporates a highly integrated CMUT array with a compact footprint of 5 mm × 5 mm, capable of both transmitting and receiving ultrasonic signals, which significantly contributes to the system's miniaturization and portability. To ensure accurate compensation for temperature-dependent variations in sound velocity, a TA610A temperature sensor is integrated for continuous real-time monitoring of the salt solution temperature. By acquiring ultrasonic echo signals, the system calculates the time-of-flight (TOF) of the acoustic waves. Based on the TOF and real-time temperature data, the sound velocity is determined, and the salt concentration is subsequently derived with temperature compensation applied to enhance measurement accuracy. Experimental results show a measurement precision of 0.1% and a maximum absolute error of 0.02%, confirming the system's high accuracy and robustness. Combining stability, reliability, and a compact real-time sensing design, the proposed CMUT-based system holds significant promise for practical deployment in various industrial and environmental monitoring scenarios.
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