Phase-Field Damage Modeling of Electromechanical Fracture in MEMS Piezoelectric Films.

Xuanyi Chen, Yuhan Zhang, Yu Xue, Yangjie Shi, Jiaxing Cheng

Abstract read

In one paragraph

Article in Materials (Basel, Switzerland), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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5 · Who and what money

Authors and funding

5 authors.

Xuanyi ChenSchool of Mechanical Engineering, Yangzhou University, Yangzhou 225009, China.

Yuhan ZhangSchool of Mechanics and Engineering, Liaoning Technical University, Fuxin 123000, China.ORCID 0009-0001-8687-9575

Yu XueSchool of Mechanical Engineering, Yangzhou University, Yangzhou 225009, China.

Yangjie ShiSchool of Mechanical Engineering, Yangzhou University, Yangzhou 225009, China.ORCID 0000-0001-9944-1364

Jiaxing ChengSchool of Mechanical Engineering, Yangzhou University, Yangzhou 225009, China.ORCID 0000-0001-8354-6452

Funding

Postgraduate Research & Practice Innovation Program of Jiangsu Province SJCX24_2207Yangzhou Natural Science Foundation YZ2025127

6 · The paper itself

Abstract

Piezoelectric thin films have been widely used in micro-electromechanical systems (MEMSs), such as sensors, actuators, and resonant devices. Electromechanically driven fractures can severely degrade device performance and reliability. In this work, a phase-field damage model is developed for MEMS piezoelectric thin films under coupled electromechanical loading, incorporating pre-existing defects via an equivalent local fracture toughness. Microcracks and micro-voids arising from manufacturing defects are integrated into the model through an effective local fracture toughness, enabling a unified description of their roles in crack initiation and propagation. The proposed model is implemented in ABAQUS by means of a user-defined element (UEL) subroutine and solved using a staggered scheme. Numerical results show that the level of pre-existing defects, the applied electric potential, and the polarization direction all exert significant effects on fracture behavior. As the defect parameter

Indexed as

crackMEMS piezoelectric filmsphase-field damage modelpolarization direction

Identifiers

PMID42073828

DOI10.3390/ma19081662

PMCPMC13118041

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.