ArticleCommunications chemistry2026
Atomistic insights into EUV photoresist photolysis via full temporal dynamics.
Article in Communications chemistry, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
1 citing paper in PubMed.
- Atomistic insights into EUV photoresist photolysis via full temporal dynamics.Communications chemistry · 2026Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
5 authors.
Funding
Abstract
One of the challenges in the development of photoresist materials is the trade-off between resolution, line roughness and sensitivity, however, the underlying dynamics remain underexplored. Here, we develop an integrated full temporal framework-combining Fermi's Golden Rule for photoionization calculation, natural orbital branching real-time TDDFT for excited-state dynamics simulation, and ab initio molecular dynamics for fragment evolution-to resolve atomistic mechanisms of EUV-induced photolysis in phenyl triflate. Simulations reproduce experimental photoelectron spectra and fragmentation products, although the computational resource limitation prevents statistically quantitative comparison with the experimental branching ratios. We find: (1) Dual bond-breaking pathways: Hole occupation weakens bonds in shallow eigenenergy-level ionizations, while energy transfer during wavefunction collapse drives direct breakage in deep ionizations; (2) Post- evolution reorganization: Electrostatic attraction mediates fragment recombination (e.g., PhO+CF
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.