ArticleSmart molecules : open access2026
Molecular nonchemically amplified resists based on spirobixanthene backbone: Sulfoxime oxime esters versus sulfonium salts.
Article in Smart molecules : open access, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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1 citing paper in PubMed.
- Fluorinated copolymer resists for high-resolution negative-tone lithography: Preparation and patterning performance.Smart molecules : open access · 2026Article
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8 authors.
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Abstract
The nonchemically amplified (nonCA) polymer resists, including ionic and non-ionic types, have achieved higher resolution and smaller line edge roughness (LER) than traditional chemically amplified ones. However, for polymer resists, chain entanglement is an inevitable limitation for the further reduction of LER. To overcome this problem, it is logical to apply the nonCA concept to molecule-based resists due to their advantages of monodispersity and small size. To date, only a few examples of ionic sulfonium salts-based nonCA molecular glass resists (nonCAMGRs) have been reported. They demonstrated high resolution and small LER well, but their electron beam sensitivity seemed less than ideal. To our knowledge, non-ionic sulfoxime oxime esters-based molecular resists were not reported yet, which leaves room for new round of more in-depth reserch on nonCAMGRs. Here, employing the excellent spirobixanthene backbone, we have first designed non-ionic sulfoxime oxime esters-based nonCAMGRs X4-NI-tf and X4-NI-tfb, for comparison, sulfonium salts-based nonCAMGRs X4-I-otfdm was designed. All exhibit favorable thermal properties (T
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