ArticleMicrosystems & nanoengineering2026
Selective laser-induced etching process-enabled double-cavity glass MEMS hydrogen sensor at room-temperature sensitivity.
Article in Microsystems & nanoengineering, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
This paper introduces a glass-based MEMS hydrogen sensor that leverages single glass wafer cavity engineering along with a melamine-formaldehyde-derived nitrogen-doped carbon sphere (NCS) support bearing a Pt catalyst. A Laser induced selective wet etch process monolithically forms high-aspect-ratio vias and double cavities in a single glass wafer. The suspended sensing membrane integrates Pt interdigital electrodes and patterned Pt/NCS catalyst islands, where pyridinic/pyrrolic nitrogen sites promote H
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