Evidence map›Paper›PMID 41986430›Full record

ArticleScientific reports2026

First-principles calculations reveal precursor-dependent reaction mechanisms in ZrO

Yunseok Kim, Mai Phuong Uyen Vu, Ho Jun Kim, Hwanyeol Park

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Scientific reports, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

4 authors.

Yunseok KimDepartment of Electronic Materials, Devices, and Equipment Engineering, Soonchunhyang University, Asan, 31538, Chungnam, Republic of Korea.
Mai Phuong Uyen VuDepartment of Electronic Materials, Devices, and Equipment Engineering, Soonchunhyang University, Asan, 31538, Chungnam, Republic of Korea.
Ho Jun KimDepartment of Mechanical Engineering, Hanyang University ERICA Campus, 55 Hanyangdaehak-ro, Sangnok-gu, Ansan, 15588, Gyeonggi-do, Republic of Korea. hojunkim9158@hanyang.ac.kr.
Hwanyeol ParkDepartment of Electronic Materials, Devices, and Equipment Engineering, Soonchunhyang University, Asan, 31538, Chungnam, Republic of Korea. phy3654@sch.ac.kr.

Funding

Korea Institute for Advancement of Technology (KIAT) RS-2025-02263458Ministry of Trade, Industry and Energy (MOTIE) RS-2025-25458147
6 · The paper itself

Abstract

While atomic layer deposition (ALD) of ZrO

Indexed as

Atomic layer deposition (ALD)Density functional theoryDFTHigh–κ dielectric filmsO3 oxidationReaction energeticsSurface terminationZrO2

Identifiers

PMID41986430
PMCPMC13323383

What OpenQuestion holds

Textmetadata
LicenceCC BY-NC-ND
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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.