PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates.

Kae Nakamura, Chi-Luen Huang, Ali Habib Akhyari, Andrea P Argüelles, Thomas N Jackson, Susan Trolier-McKinstry

Abstract read

In one paragraph

Article in Sensors (Basel, Switzerland), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it

0cells of the map it votes in

0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

Kae NakamuraDepartment of Materials Science and Engineering, The Pennsylvania State University, University Park, PA 16802, USA.ORCID 0009-0007-2926-5415

Chi-Luen HuangDepartment of Engineering Science and Mechanics, The Pennsylvania State University, University Park, PA 16802, USA.ORCID 0000-0001-7862-3273

Ali Habib AkhyariDepartment of Materials Science and Engineering, The Pennsylvania State University, University Park, PA 16802, USA.ORCID 0009-0002-1821-0586

Andrea P ArgüellesMaterials Research Institute, The Pennsylvania State University, University Park, PA 16802, USA.ORCID 0000-0002-8089-4926

Thomas N JacksonSchool of Electrical Engineering and Computer Science, The Pennsylvania State University, University Park, PA 16802, USA.

Susan Trolier-McKinstryDepartment of Materials Science and Engineering, The Pennsylvania State University, University Park, PA 16802, USA.ORCID 0000-0002-7267-9281

Funding

Department of Materials Science and Engineering, The Pennsylvania State University Steward S. Flaschen professorshipNational Science Foundation, as part of the Center for Dielectrics and Piezoelectrics IIP-1841466 and IIP-1841453The Pennsylvania State University Steward S. Flaschen professorship

6 · The paper itself

Abstract

A bottom-up fabrication approach for flexible piezoelectric micromachined ultrasound transducer (PMUT) arrays on stainless-steel substrates was developed. Devices were fabricated using chemical solution deposition of a 700 nm-thick layer of Pb

Indexed as

flexible MEMSmetal foilPMUTPZT

Identifiers

PMID41978031

DOI10.3390/s26072246

PMCPMC13075221

What OpenQuestion holds

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LicenceCC BY

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.