ArticleNature communications2026
Turing-patterned Ta
Article in Nature communications, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
0 citing papers in PubMed.
No citing paper in PubMed yet.
Corrections and comments
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Authors and funding
16 authors.
Funding
Abstract
As semiconductor technology advances towards the 15-Å node and beyond, the back-end-of-line (BEOL) metal interconnect technology encounters severe scaling challenge, because the conventional barrier/liner TaN/Ta(Co) bilayer cannot be proportionally thinned down as the pitch size shrinks. This challenge arouses significant resistance-capacitance (RC) delay that is currently the bottleneck for advanced integrated circuits. Herein, we propose a Turing-patterned Ta
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.