ArticleSensors (Basel, Switzerland)2026
Reconstruction of Misalignment Aberrations for Cylindrical Surfaces with Complex Parameters in Pseudo Lateral Shearing Interferometry.
Article in Sensors (Basel, Switzerland), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
Cylindrical surfaces with complex parameters (CSCPs) have off-axis and aspheric properties. High-precision measurement of cylindrical surfaces is a key research focus in optical metrology. Two-dimensional pseudo lateral shearing interferometry (2DPLSI) enables non-null generalized interferometry for cylindrical surfaces. However, due to the non-rotational symmetry of cylindrical surfaces with complex parameters, measuring them using two-dimensional pseudo lateral shearing interferometry inevitably introduces misalignment aberrations, degrading the accuracy of cylindrical surface reconstruction. To address this issue, we propose a novel non-null testing method: the cylindrical surface is translated in the orthogonal directions to carry out the shearing process, and wavefront errors are eliminated through second-order differencing. Furthermore, a reconstruction algorithm in one direction is proposed. Using only the partial derivative in the x direction, the wavefront error of misalignment aberrations can be reconstructed, enabling high-precision recovery of the cylindrical surface. Experimental results using a Fizeau interferometer demonstrate that the proposed method effectively reconstructs misalignment aberrations. The reconstructed cylindrical surface achieves a peak-to-valley (PV) value of 0.45λ (λ = 632.8 nm) and a root-mean-square (RMS) value of 0.12λ, comparable to the 0.37λ PV and 0.09λ RMS obtained via null testing. The repeatability of the proposed method is superior to λ/1000 RMS.
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