Enhanced Fringing Field Micro-Moisture Sensor with Elements Optimization.

This research demonstrates the principle and optimization methodology to create economic and miniaturized high-resolution micro-moisture sensors. The interdigitated fringe electric field-based moisture measurement principle is firstly investigated to sketch the key parameters of printed circuit board (PCB)-based sensors for further performance optimization. Then, a comprehensive study is conducted to analyze parameter variations with conclusions of suggested design rules to achieve higher measurement sensitivity. Two prototypes are designed and manufactured to validate the proposed theoretical contributions. Water droplets are employed to control the ambient relative humidity, which is adopted as the actual moisture variable in this work. A double-correlated sampling circuit is used for capacitance sensing. Both of them demonstrate a linearity of 1% and sensitivity of 0.1 pF/mg levels, but prototype 2 gains a better batch consistency, which is beneficial for commercialization. Further data analysis suggests that the equivalent input-output sensitivity reaches a level of 1.2403 pF/%RH (relative humidity), which is significantly higher than other types of published interdigitated fringe electric field-type moisture sensors. The optimized prototypes also show advantages of miniaturized size, low cost and high consistency, which can potentially impact the industry applications.