Design and Implementation of a Low-Noise Analog Front-End Circuit for MEMS Capacitive Accelerometers.

Keru Gong, Jiacheng Li, Xiaoyi Wang, Huiliang Cao, Huikai Xie

Abstract read

In one paragraph

Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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0citing papers in PubMed

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1 · What the graph read from it

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Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

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Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

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4 · The record

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5 · Who and what money

Authors and funding

5 authors.

Keru GongSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.

Jiacheng LiSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.

Xiaoyi WangSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.

Huiliang CaoSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.ORCID 0000-0001-9862-4329

Huikai XieSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.ORCID 0000-0002-8393-0021

Funding

National High Level Hospital Clinical Research Funding BJ-2024-166National Natural Science Foundation of China 52475586 and U2230206Science and Technology Innovation Key R&D Program of Chongqing CSTB2025TIAD-STX0016

6 · The paper itself

Abstract

This paper presents a low-noise analog front-end (AFE) integrated circuit (IC) circuit for capacitive micro-electromechanical system (MEMS) accelerometers that can be used for optical image stabilization (OIS) in various optical imaging systems. The AFE circuit design features a fully differential chopper stabilization technique that efficiently minimizes low-frequency 1/f noise and parasitic coupling. The AFE circuit chip is fabricated in a 0.18 μm complementary metal-oxide-semiconductor (CMOS) technology and co-packaged with an x-axis capacitive MEMS accelerometer based on a silicon-on-glass (SOG) process. The SOG accelerometer has a footprint of 1000 μm × 950 μm. The packaged system demonstrates a sensitivity of 342 mV/g and a nonlinearity of 1.1% between -1 g and +1 g, a dynamic range of 88 dB, and an equivalent noise floor of 14 μg/Hz.

Indexed as

accelerometeranalog front-end electronicsCMOSMEMSoptical image stabilization

Identifiers

PMID41900263

DOI10.3390/mi17030378

PMCPMC13029335

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.