ArticleMicromachines2026
Fabrication of Terahertz Fresnel Zone Plates via Ultraprecision Mechanical Processing.
Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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3 authors.
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Abstract
This study proposes a new fabrication process for terahertz Fresnel zone plates on high-resistivity silicon substrates. It involves ion implantation surface modification, ultra-precision diamond turning, and magnetron sputtering, followed by polishing. Ductile-regime cutting is used to form smooth microgrooves, which are selectively metallized to create alternating opaque and transparent zones for terahertz waves. Finite-element simulations are performed to design the zone structure and to evaluate the effect of process-induced radius errors. A 3 μm amorphous layer is formed via ion implantation, which significantly enhances the ductile-to-brittle transition depth of silicon from 55 nm to about 535 nm while causing only minor changes in terahertz transmittance. The results demonstrate that the proposed method can produce high-quality Fresnel zone plates on silicon and offers a practical route to compact diffractive terahertz components.
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