Study on the Mechanism of Chemical-Mechanical Synergistic Removal of SiC Surfaces Based on Electrochemical Friction Wear of Grinding Wheel Pairs.

Lijie Wu, Zhijun Chen, Yangting Ou, Jiawen Yao, Hang Zhang, Qiusheng Yan, Jisheng Pan

Abstract read

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Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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Authors and funding

7 authors.

Lijie WuSchool of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China.

Zhijun ChenSchool of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China.

Yangting OuSchool of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China.ORCID 0009-0001-2239-7833

Jiawen YaoSchool of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China.

Hang ZhangSchool of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China.ORCID 0009-0001-4887-9777

Qiusheng YanSchool of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China.

Jisheng PanSchool of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China.ORCID 0000-0002-0409-090X

Funding

Department of Science and Technology of Guangdong Province No.2024B0101120003Ministry of Science and Technology of the People's Republic of China No. 2024YFE0205600

6 · The paper itself

Abstract

With the advancement of SiC wafers toward 12 inches and innovations in laser cutting technology, new demands have emerged for SiC grinding techniques-namely, high efficiency, low loss, and low wear ratio. This paper investigates electrochemical-assisted grinding of SiC using a grinding wheel-SiC pair model system, examining the effects of electrolyte type, concentration, voltage, load, and rotational speed on wear behavior. Experimental results reveal that NaCl is the most effective electrolyte among the six candidates tested. In the NaCl system, wear behavior is strongly influenced by the interplay between voltage and rotational speed. At a constant voltage of 3 V, increasing the rotational speed to 600 rpm produces a wear area of 1911.93 μm

Indexed as

electrochemical grindingfriction and wearlaser-exfoliated surfacesingle-crystal SiCsurface quality

Identifiers

PMID41900193

DOI10.3390/mi17030307

PMCPMC13028199

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