ArticleMicrosystems & nanoengineering2026
Advanced reusable SAW-based particulate matter sensor with microheater and porous microstructured filter membrane for simultaneous PM10 and PM2.5 detection.
Article in Microsystems & nanoengineering, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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3 authors.
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Abstract
In this study, we present a novel reusable surface acoustic wave (SAW)-based particulate matter (PM) sensor system capable of simultaneously and selectively detecting PM10 and PM2.5. This is the first implementation of an integrated porous microstructure membrane, acting as a mechanical filter for particle separation, combined with an on-board microheater for particle detachment, enabling sensor reusability. The membrane featured holes of approximately 3 µm and 11 µm in diameter, allowing for selective detection of PM2.5 and PM10, respectively. A two-port SAW resonator structure and 128
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