ArticleMicrosystems & nanoengineering2026
Exploring the synergic effect of thermal tuning and mode-coupling for frequency stabilization in micromechanical resonators.
Article in Microsystems & nanoengineering, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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Who cites it
1 citing paper in PubMed.
- Frequency Stability Degradation in Quartz and MEMS Oscillators.Sensors (Basel, Switzerland) · 2026Review
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Authors and funding
4 authors.
Funding
Abstract
This work investigates the synergic effect of thermal tuning and mode-coupling on frequency stability in a dual-mode micromechanical resonator. Under dynamic input excitation, the signal in one mode induces the frequency shift of the other mode due to the self-heating and mode-coupling effects. We propose a method to stabilize frequency of the dual-mode resonator under dynamic piezoelectric excitation. The method leverages an on-chip micro-oven to thermally tune the resonator at different temperature coefficients of frequency (TCF) points, enabling the control of self-heating and mode-coupling induced resonant frequency shifts. In our experiment, the resonator is maintained at an appropriately selected TCF point, where the frequency shift caused by mode-coupling can be compensated by the self-heating effect. These findings provide valuable insights into the thermal and nonlinear dynamics of dual-mode resonators and offer a promising strategy for designing high-performance micromechanical resonators in timing and sensing applications.
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Registered trials
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