ArticleScientific reports2026
Low-voltage U-shaped RF MEMS shunt switch integration for K-band phased array beam steering.
Article in Scientific reports, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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Abstract
This work presents the design and system-level integration of a low-voltage U-shaped meander RF MEMS shunt switch with a K-band phased array antenna for agile and efficient beam steering. The proposed switch achieves a pull-in voltage of 5.3 V, a return loss better than - 30 dB, and an insertion loss as 0.45 dB, ensuring minimal signal degradation across 18-27 GHz. By incorporating the switch into a distributed MEMS transmission line (DMTL) phase shifter network, discrete and reconfigurable phase states are realized, enabling dynamic control of the progressive phase shift between array elements. A four-element series-fed patch array integrated with the MEMS phase shifter demonstrates a steering range of ± 30 °C with low side-lobe levels and high radiation efficiency, confirming its suitability for high-frequency front-end modules. The results confirm that the proposed MEMS-integrated phased array achieves industry-leading low actuation voltage with minimal RF loss, positioning it as a strong candidate for 6G and satellite front-end modules.
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