Evidence map›Paper›PMID 41760599›Full record

ReviewMicrosystems & nanoengineering2026

Terahertz MEMS actuators and applications.

Zilai Wang, Naibo Zhang, Yiran Zhang, Haozhe Hou, Yu Jin, Conghui Liu, Haijian Huang, Qiuquan Guo, Jianming Huang, Yansong Cui and 4 more

Abstract readReview
PubMed Full text at PMC Publisher
In one paragraph

Review in Microsystems & nanoengineering, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

14 authors.

Zilai Wang *School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing, 100876, China.ORCID http://orcid.org/0009-0001-1807-0862
Naibo Zhang *School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing, 100876, China. zhangnaibai@163.com.
Yiran ZhangSchool of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing, 100876, China.
Haozhe HouSchool of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing, 100876, China.
Yu JinSchool of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing, 100876, China.
Conghui LiuSchool of Shenzhen Institute for Advanced Study, University of Electronic Science and Technology of China, Chengdu, 611731, China.
Haijian HuangSchool of Shenzhen Institute for Advanced Study, University of Electronic Science and Technology of China, Chengdu, 611731, China.
Qiuquan GuoSchool of Shenzhen Institute for Advanced Study, University of Electronic Science and Technology of China, Chengdu, 611731, China. guoqiuquan@uestc.edu.cn.
Jianming HuangSchool of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing, 100876, China.
Yansong CuiSchool of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing, 100876, China.
Weizheng RenSchool of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing, 100876, China.
Dongxing ZhangSchool of Shenzhen Institute for Advanced Study, University of Electronic Science and Technology of China, Chengdu, 611731, China.ORCID http://orcid.org/0000-0002-2526-8391
Ke HanSchool of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing, 100876, China.
Jun YangSchool of Shenzhen Institute for Advanced Study, University of Electronic Science and Technology of China, Chengdu, 611731, China. junyang@uestc.edu.cn.ORCID http://orcid.org/0009-0007-1658-365X

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

In recent years, micro-electromechanical systems (MEMS) actuators have emerged as innovative solutions for enhancing the dynamic control of terahertz devices, leveraging their advantages of miniaturization, low power consumption, and high integration. This paper provides a comprehensive review of the fundamental technological advancements in terahertz MEMS actuators, with a particular emphasis on the analysis of the performance characteristics of various driving mechanisms and the integration strategies. Furthermore, it systematically presents the diverse forms of terahertz MEMS actuators utilized in terahertz switches and tunable resonators, highlighting the significant advancements they have made in applications including sensing, frequency and polarization tuning, beamforming, and logical operations. By leveraging cutting-edge microfabrication techniques and functional materials, terahertz MEMS actuators are capable of achieving wideband tuning, high-sensitivity sensing, and the modulation of intricate electromagnetic responses. Additionally, the review examines prospective development trajectories, offering theoretical insights and technical strategies to support the transition of terahertz technology from laboratory settings to practical applications in domains such as 6 G communication, high-resolution imaging, and intelligent sensing.

Identifiers

PMID41760599
PMCPMC12949139

What OpenQuestion holds

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LicenceCC BY-NC-ND
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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.