ArticleMicromachines2026
Beam Drift Mitigation and Wide-Range Measurement in a Miniaturized Ultrasonic Gas Flowmeter.
Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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5 authors.
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Abstract
To mitigate acoustic beam drift, which degrades the signal-to-noise ratio (SNR) and limits the measurement range in ultrasonic gas flowmeters (USFMs), we present a miniaturized transit-time USFM that integrates a single piezoelectric micromachined ultrasonic transducer (PMUT) with a non-axisymmetric conical cavity. This design increases acoustic transmission gain and produces anisotropic directivity across orthogonal radiation planes, thereby broadening acoustic coverage along the flow direction and reducing beam steering. With an optimized cavity angle combination of (50°, 70°), the system achieves a 7.4 dB transmission gain and a half-power beamwidth (HPBW) of 29.1°. Experimental validation demonstrates a sound pressure attenuation of only 0.72 dB at 18.74 m/s. Within the 0.06-12 m
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