ArticleMicromachines2026
Ultrathin Microlens Arrays for Dynamic Beam Shaping Based on 3D Lithography.
Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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6 authors.
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Abstract
Conventional microlens arrays (MLAs) are often constrained by their static focal properties, which limit post-fabrication adaptability in dynamic optical systems. To address this, we demonstrate a tunable beam shaper capable of real-time spot-size modulation by introducing an adjustable axial displacement between a primary lens and an MLA. A critical advancement of this work is the fabrication of ultra-thin MLAs featuring an exceptionally low aspect ratio (1:187.5) and continuous surface profiles. Through optimizing 3D lithography and ion beam etching (IBE) workflows, we achieved an optical-grade surface finish with a roughness (
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