A Fixed-End Beam-Cantilever Piezoelectric MEMS Speaker with Flexible Supporting Layer.

Guanzong Shao, Yujiang Li, Zhiyong Hu, Qi Wang, Jinshi Zhao

Abstract read

In one paragraph

Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it

0cells of the map it votes in

1citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

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Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

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3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

Lie Classification and Symmetry-Preserving Reduced-Order Modeling of Nonlinear Electrostatic MEMS.Micromachines · 2026
Article

4 · The record

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PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

5 authors.

Guanzong ShaoSchool of Integrated Circuit Science and Engineering, Engineering Research Center of Optoelectronic Devices and Communication Technology, Ministry of Education, State Key Laboratory of Crystal Materials, Tianjin University of Technology, Tianjin 300384, China.

Yujiang LiSchool of Integrated Circuit Science and Engineering, Engineering Research Center of Optoelectronic Devices and Communication Technology, Ministry of Education, State Key Laboratory of Crystal Materials, Tianjin University of Technology, Tianjin 300384, China.

Zhiyong HuNational Key Laboratory of Advanced Micro and Nano Manufacture Technology, Shanghai Jiao Tong University, Shanghai 200240, China.

Qi WangSchool of Integrated Circuit Science and Engineering, Engineering Research Center of Optoelectronic Devices and Communication Technology, Ministry of Education, State Key Laboratory of Crystal Materials, Tianjin University of Technology, Tianjin 300384, China.

Jinshi ZhaoSchool of Integrated Circuit Science and Engineering, Engineering Research Center of Optoelectronic Devices and Communication Technology, Ministry of Education, State Key Laboratory of Crystal Materials, Tianjin University of Technology, Tianjin 300384, China.

Funding

Tianjin Municipal Enterprise Science and Technology Commissioner Project 25YDTPJC00540

6 · The paper itself

Abstract

Conventionally designed piezoelectric micro-electro-mechanical systems (MEMS) speakers with thin-film-type, piston-type, and cantilever-type vibration membranes still adopt a Si supporting layer, which not only hinders the improvement of sound pressure level (SPL) but also lacks characterization of reliability. In this paper, we propose a fixed-end beam-cantilever piezoelectric MEMS speaker with a flexible supporting layer, achieving an SPL comparable to that of traditional three types of piezoelectric MEMS speakers with a Si supporting layer, and displaying good reliability. The measured results performed on encapsulated prototypes mounted to an acoustic test adaptor demonstrate that under a driving voltage of 1 V

Indexed as

fixed-end beam–cantileverflexible supporting layerMEMSpiezoelectricspeaker

Identifiers

PMID41753871

DOI10.3390/mi17020215

PMCPMC12942954

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.