Evidence map›Paper›PMID 41753821›Full record

ArticleMicromachines2026

Sensitivity Analysis of Process Parameters on Deposition Quality and Multi-Objective Prediction in Ion-Assisted Electron Beam Evaporation of Ta

Yaowei Wei, Jianchong Li, Wenze Ma, Hongqin Lei, Fei Zhang, Zhenfei Luo, Henan Liu, Xianghui Huang, Linjie Zhao, Mingjun Chen

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Micromachines, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

10 authors.

Yaowei WeiSchool of Mechanical and Power Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.
Jianchong LiSchool of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China.
Wenze MaSchool of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China.
Hongqin LeiLaser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China.
Fei ZhangLaser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China.
Zhenfei LuoLaser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China.
Henan LiuSchool of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China.
Xianghui HuangSchool of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China.
Linjie ZhaoSchool of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China.
Mingjun ChenSchool of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China.

Funding

China Postdoctoral Science Foundation 2024T171156Fundamental Research Funds for the Central Universities HIT.DZJJ.2024023Heilongjiang Provincial Chunyan Talent Support Program for Science and Technology CYQN24055National Natural Science Foundation of China 52175389National Natural Science Foundation of China 52235010National Natural Science Foundation of China 52293403National Natural Science Foundation of China 52405466National Natural Science Foundation of China 524B2064Presidential Foundation of CAEP YZJJZQ2022014Young Elite Scientists Sponsorship Program by CAST YESS20240573
6 · The paper itself

Abstract

Tantalum pentoxide (Ta

Indexed as

ion-assisted electron beam evaporationphysics-informed Bayesian optimizationrefractive indexsurface roughnessTa2O5 film

Identifiers

PMID41753821
PMCPMC12943480

What OpenQuestion holds

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LicenceCC BY
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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.