ArticleMicrosystems & nanoengineering2026
High sensitivity SAW hydrogen gas sensor based on thermal conductivity effect.
Article in Microsystems & nanoengineering, 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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7 authors.
Funding
Abstract
Wide-range and high-sensitivity hydrogen sensors are critically important for hydrogen safety in aerospace and advanced transportation sectors. This work demonstrates a thermal-conductivity surface acoustic wave (SAW) based sensor to achieve high sensitivity hydrogen sensing. By integrating thermal balance and acoustic wave equations, a precise mechanistic model elucidating the structure-activity relationships among gas flow rate, operating temperature, and MEMS architecture in determining sensing sensitivity is constructed. Guided by this model, the SAW hydrogen sensor with on-chip microheater integration was developed. Furthermore, a highly integrated SAW hydrogen sensing system with ultra-low baseline noise (<30 µV) was constructed for performance evaluation. Leveraging the exceptional thermal sensitivity of the SAW device and system stability, the optimized sensor achieves wide detection range (up to 100% vol), low detection limit (~6 ppm), rapid response and recovery time (T
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Registered trials
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