Emission-Programmed Femtosecond Bessel Beams for Fabricating Micro-Nano Hierarchical Structures.

Yu Lu, Lin Kai, Fei Yin, Qing Yang, Kaiduan Yue, Feng Chen

Abstract read

In one paragraph

Article in Nanomaterials (Basel, Switzerland), 2026. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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2 · The registry

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5 · Who and what money

Authors and funding

6 authors.

Yu LuState Key Laboratory for Manufacturing System Engineering and Shanxi Key Laboratory of Photonics Technology for Information, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Lin KaiState Key Laboratory for Manufacturing System Engineering and Shanxi Key Laboratory of Photonics Technology for Information, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Fei YinSchool of Instrument Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China.

Qing YangSchool of Instrument Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China.

Kaiduan YueSchool of Instrument Science and Technology, Xi'an Jiaotong University, Xi'an 710049, China.

Feng ChenState Key Laboratory for Manufacturing System Engineering and Shanxi Key Laboratory of Photonics Technology for Information, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China.ORCID 0000-0002-7031-7404

Funding

National Natural Science Foundation of China 12127806, 62175195, 12304382

6 · The paper itself

Abstract

Ultrafast laser-induced micro-nano hierarchical structures show broad applicability in optoelectronics, functional surfaces, and biomedicine. However, precisely controlling their formation through light field manipulation remains a relatively unexplored area. This work demonstrates a rapid drilling strategy on silicon using an emission-programmed, high-repetition-rate femtosecond Bessel beam. This spatiotemporal modulation enables a unique manufacturing synergy that integrates subtractive drilling and thermo-fluidic redistribution by the central lobes with additive nanostructuring by the peripheral lobes, directly fabricating a micro-nano hierarchical structure comprising tapered micro-holes, elevated micropillars, and dense nanocoatings. Meanwhile, areal scanning enables programmable geometry control through line interval adjustment. This approach offers new insights into laser-matter interactions and facilitates applications in infrared photodetection or drag-reduction surfaces.

Indexed as

Bessel beamfemtosecond laser manufacturingmicro–nano hierarchical structure

Identifiers

PMID41745153

DOI10.3390/nano16040236

PMCPMC12943786

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LicenceCC BY

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.